In situ thermal nitridation of GaAs using metalorganic vapor phase epitaxy

TitleIn situ thermal nitridation of GaAs using metalorganic vapor phase epitaxy
Publication TypeJournal Article
Year of Publication1998
AuthorsSun, JX, Zhang, L, Kuech, TF
JournalJournal of Crystal Growth
Volume195
Pagination711-717
Date PublishedDec
DOI10.1016/s0022-0248(98)00599-5