In situ RHEED and AFM investigation of growth front morphology evolution of Si(001) grown by UHV-CVD

TitleIn situ RHEED and AFM investigation of growth front morphology evolution of Si(001) grown by UHV-CVD
Publication TypeJournal Article
Year of Publication1995
AuthorsNayak, S, Savage, DE, Chu, HN, Lagally, MG, Kuech, TF
JournalJournal of Crystal Growth
Volume157
Pagination168-171
Date PublishedDec
DOI10.1016/0022-0248(95)00383-5