Self-Assembly of an Ultrahigh-chi Block Copolymer with Versatile Etch Selectivity

TitleSelf-Assembly of an Ultrahigh-chi Block Copolymer with Versatile Etch Selectivity
Publication TypeJournal Article
Year of Publication2018
AuthorsAzuma, K, Sung, J, Choo, Y, Rokhlenko, Y, Dwyer, JH, Schweitzer, B, Hayakawa, T, Osuji, CO, Gopalan, P
JournalMacromolecules
Volume51
Pagination6460-6467
Date PublishedAug
ISBN Number0024-9297
DOI10.1021/acs.macromol.8b01409