SELECTIVE GAAS/ALXGA1-X AS REACTIVE ION ETCHING USING CCL2F2

TitleSELECTIVE GAAS/ALXGA1-X AS REACTIVE ION ETCHING USING CCL2F2
Publication TypeJournal Article
Year of Publication1986
AuthorsKnoedler, CM, Kuech, TF
JournalJournal of Vacuum Science & Technology B
Volume4
Pagination1233-1236
Date PublishedSep-Oct
DOI10.1116/1.583487