QUANTITATIVE OXYGEN MEASUREMENTS IN OMVPE ALXGA1-XAS GROWN BY METHYL PRECURSORS

TitleQUANTITATIVE OXYGEN MEASUREMENTS IN OMVPE ALXGA1-XAS GROWN BY METHYL PRECURSORS
Publication TypeJournal Article
Year of Publication1992
AuthorsKuech, TF, Potemski, R, Cardone, F, Scilla, G
JournalJournal of Electronic Materials
Volume21
Pagination341-346
Date PublishedMar
DOI10.1007/bf02660464