Observation and control of electrochemical etching effects in the fabrication of InAs/AlSb/GaSb heterostructure devices

TitleObservation and control of electrochemical etching effects in the fabrication of InAs/AlSb/GaSb heterostructure devices
Publication TypeJournal Article
Year of Publication2008
AuthorsSu, N, Tang, Y, Zhang, Z, Kuech, TF, Fay, P
JournalJournal of Vacuum Science & Technology B
Volume26
Pagination1025-1029
Date PublishedMay
DOI10.1116/1.2924328