Nanolithography using hierarchically assembled nanowire masks

TitleNanolithography using hierarchically assembled nanowire masks
Publication TypeJournal Article
Year of Publication2003
AuthorsWhang, D, Jin, S, Lieber, CM
JournalNano Letters
Volume3
Pagination951-954
Date PublishedJul
ISBN Number1530-6984
Accession NumberWOS:000184107300016