Modeling of transport and reaction in a novel hydride vapor phase epitaxy system

TitleModeling of transport and reaction in a novel hydride vapor phase epitaxy system
Publication TypeJournal Article
Year of Publication2019
AuthorsYao, M, Rawlings, JB, Kuech, TF
JournalJournal of Crystal Growth
Volume513
Pagination58-68
Date PublishedMay
ISBN Number0022-0248
DOI10.1016/j.jcrysgro.2019.02.046