Model development of GaN MOVPE growth chemistry for reactor design

TitleModel development of GaN MOVPE growth chemistry for reactor design
Publication TypeJournal Article
Year of Publication2000
AuthorsSun, JX, Redwing, JM, Kuech, TF
JournalJournal of Electronic Materials
Volume29
Pagination2-9
Date PublishedJan
DOI10.1007/s11664-000-0085-5