Lateral epitaxial overgrowth of GaN using diethyl gallium chloride in metal organic vapor phase epitaxy

TitleLateral epitaxial overgrowth of GaN using diethyl gallium chloride in metal organic vapor phase epitaxy
Publication TypeJournal Article
Year of Publication2002
AuthorsZhang, L, Gu, SL, Zhang, R, Hansen, DM, Boleslawski, MP, Kuech, TF
JournalJournal of Crystal Growth
Volume235
Pagination115-123
Date PublishedFeb
DOI10.1016/s0022-0248(01)01835-8