Integration of block copolymer directed assembly with 193 immersion lithography

TitleIntegration of block copolymer directed assembly with 193 immersion lithography
Publication TypeJournal Article
Year of Publication2010
AuthorsLiu, C-C, Nealey, PF, Raub, AK, Hakeem, PJ, Brueck, SRJ, Han, E, Gopalan, P
JournalJournal of Vacuum Science & Technology B
Volume28
PaginationC6B30-C6B34
Date PublishedNov
Accession NumberISI:000285015200007