High-sensitivity silicon ultraviolet p plus -i-n avalanche photodiode using ultra-shallow boron gradient doping

TitleHigh-sensitivity silicon ultraviolet p plus -i-n avalanche photodiode using ultra-shallow boron gradient doping
Publication TypeJournal Article
Year of Publication2017
AuthorsXia, ZY, Zang, K, Liu, D, Zhou, M, Kim, TJ, Zhang, HL, Xue, MY, Park, J, Morea, M, Ryu, JH, Chang, TH, Kim, J, Gong, S, Kamins, TI, Yu, ZF, Wang, ZH, Harris, JS, Ma, ZQ
JournalApplied Physics Letters
Volume111
Date PublishedAug
DOI10.1063/1.4985591