The Heteroepitaxy of Ge on Si a Comparison of Chemical Vapor and Vacuum-Deposited Layers

TitleThe Heteroepitaxy of Ge on Si a Comparison of Chemical Vapor and Vacuum-Deposited Layers
Publication TypeJournal Article
Year of Publication1982
AuthorsMaenpaa, M, Kuech, TF, Nicolet, MA, Lau, SS, Sadana, DK
JournalJournal of Applied Physics
Volume53
Pagination1076-1083