FILM STRESS OF SPUTTERED W/C MULTILAYERS AND STRAIN RELAXATION UPON ANNEALING

TitleFILM STRESS OF SPUTTERED W/C MULTILAYERS AND STRAIN RELAXATION UPON ANNEALING
Publication TypeJournal Article
Year of Publication1994
AuthorsGeisz, JF, Kuech, TF, Lagally, MG, Cardone, F, Potemski, RM
JournalJournal of Applied Physics
Volume75
Pagination1530-1533
Date PublishedFeb
DOI10.1063/1.356390