Chemical and physical effects in oxygen incorporation during the metalorganic vapor phase epitaxial growth of GaAs

TitleChemical and physical effects in oxygen incorporation during the metalorganic vapor phase epitaxial growth of GaAs
Publication TypeJournal Article
Year of Publication1996
AuthorsKuech, TF, Nayak, S, Huang, JW, Li, J
JournalJournal of Crystal Growth
Volume163
Pagination171-179
Date PublishedMay
DOI10.1016/0022-0248(95)01056-4