ALKOXIDE PRECURSORS FOR CONTROLLED OXYGEN INCORPORATION DURING METALORGANIC VAPOR-PHASE EPITAXY GAAS AND ALXGA1-XAS GROWTH

TitleALKOXIDE PRECURSORS FOR CONTROLLED OXYGEN INCORPORATION DURING METALORGANIC VAPOR-PHASE EPITAXY GAAS AND ALXGA1-XAS GROWTH
Publication TypeJournal Article
Year of Publication1994
AuthorsHuang, JW, Gaines, DF, Kuech, TF, Potemski, RM, Cardone, F
JournalJournal of Electronic Materials
Volume23
Pagination659-667
Date PublishedJul
DOI10.1007/bf02653353