Adsorption and decomposition studies of t-butyl silane on Si(100)-(2x1) surfaces using FTIR-ATR spectroscopy

TitleAdsorption and decomposition studies of t-butyl silane on Si(100)-(2x1) surfaces using FTIR-ATR spectroscopy
Publication TypeJournal Article
Year of Publication1997
AuthorsRudkevich, E, Saulys, D, Gaines, D, Kuech, TF, McCaughan, L
JournalSurface Science
Volume383
Pagination69-77
Date PublishedJul
DOI10.1016/s0039-6028(97)00120-9