All Department Publications

Found 1 results
Author Title Type [ Year(Asc)]
Filters: Author is Brueck, Steve R. J.  [Clear All Filters]
2010
Liu C-C, Nealey PF, Raub AK, Hakeem PJ, Brueck SRJ, Han E, Gopalan P. Integration of block copolymer directed assembly with 193 immersion lithography. Journal of Vacuum Science & Technology B. 2010;28:C6B30-C6B34.

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