THE USE OF CHLORIDE BASED PRECURSORS IN METALORGANIC VAPOR-PHASE EPITAXY

TitleTHE USE OF CHLORIDE BASED PRECURSORS IN METALORGANIC VAPOR-PHASE EPITAXY
Publication TypeJournal Article
Year of Publication1991
AuthorsKuech, TF
JournalJournal of Crystal Growth
Volume115
Pagination52-60
Date PublishedDec
DOI10.1016/0022-0248(91)90711-d