Tunable biaxial in-plane compressive strain in a Si nanomembrane transferred on a polyimide film

TitleTunable biaxial in-plane compressive strain in a Si nanomembrane transferred on a polyimide film
Publication TypeJournal Article
Year of Publication2015
AuthorsKim, M, Mi, H, Cho, M, Seo, JH, Zhou, W, Gong, S, Ma, Z
JournalApplied Physics Letters
Volume106
DOI10.1063/1.4922043