Tribochemistry and material transfer for the ultrananocrystalline diamond-silicon nitride interface revealed by x-ray photoelectron emission spectromicroscopy

TitleTribochemistry and material transfer for the ultrananocrystalline diamond-silicon nitride interface revealed by x-ray photoelectron emission spectromicroscopy
Publication TypeJournal Article
Year of Publication2007
AuthorsGrierson, DS, Sumant, AV, Konicek, AR, Abrecht, M, Birrell, J, Auciello, O, Carlisle, JA, Scharf, TW, Dugger, MT, Gilbert, PUPA, Carpick, RW
JournalJournal of Vacuum Science & Technology B
Volume25
Pagination1700-1705
Date PublishedSep-Oct
ISBN Number1071-1023
Accession NumberWOS:000250433500026