Transport and reaction behaviors of precursors during metalorganic vapor phase epitaxy of gallium nitride

TitleTransport and reaction behaviors of precursors during metalorganic vapor phase epitaxy of gallium nitride
Publication TypeJournal Article
Year of Publication1999
AuthorsSun, JX, Redwing, JM, Kuech, TF
JournalPhysica Status Solidi A-Applied Research
Volume176
Pagination693-698
Date PublishedNov
DOI10.1002/(sici)1521-396x(199911)176:1<693::aid-pssa693>3.0.co;2-z