Synthesis of Photoacid Generator-Containing Patternable Diblock Copolymers by Reversible Addition-Fragmentation Transfer Polymerization

TitleSynthesis of Photoacid Generator-Containing Patternable Diblock Copolymers by Reversible Addition-Fragmentation Transfer Polymerization
Publication TypeJournal Article
Year of Publication2009
AuthorsKim, YJ, Kang, HM, Leolukman, M, Nealey, PF, Gopalan, P
JournalChemistry of Materials
Volume21
Pagination3030-3032
Date PublishedJul
Accession NumberISI:000268174400002
Keywordsblends, block-copolymers, Chemically amplified resists, chemistry, Chemistry, Physical, lithography, Materials Science, Multidisciplinary, radical polymerization, raft process, thin-films
Short TitleChem. Mat