A STUDY OF SILICON INCORPORATION IN GAAS MOCVD LAYERS

TitleA STUDY OF SILICON INCORPORATION IN GAAS MOCVD LAYERS
Publication TypeJournal Article
Year of Publication1985
AuthorsVeuhoff, E, Kuech, TF, Meyerson, BS
JournalJournal of the Electrochemical Society
Volume132
Pagination1958-1961
ISBN Number0013-4651
DOI10.1149/1.2114261