Study on sapphire surface preparation for III-nitride heteroepitaxial growth by chemical treatments

TitleStudy on sapphire surface preparation for III-nitride heteroepitaxial growth by chemical treatments
Publication TypeJournal Article
Year of Publication2002
AuthorsDwikusuma, F, Saulys, D, Kuech, TF
JournalJournal of the Electrochemical Society
Volume149
PaginationG603-G608
Date PublishedNov
DOI10.1149/1.1509072