Structure of AlN on Si (111) deposited with metal organic vapor phase epitaxy

TitleStructure of AlN on Si (111) deposited with metal organic vapor phase epitaxy
Publication TypeJournal Article
Year of Publication1999
AuthorsRehder, E, Zhou, M, Zhang, L, Perkins, NR, Babcock, SE, Kuech, TF
JournalMRS Internet Journal of Nitride Semiconductor Research
Volume4
Paginationart. no.-G3.56