SiGe relaxation on silicon-on-insulator substrates: An experimental and modeling study

TitleSiGe relaxation on silicon-on-insulator substrates: An experimental and modeling study
Publication TypeJournal Article
Year of Publication2003
AuthorsRehder, EM, Inoki, CK, Kuan, TS, Kuech, TF
JournalJournal of Applied Physics
Volume94
Pagination7892-7903
Date PublishedDec
DOI10.1063/1.1628406