Shape control and density multiplication of cylinder-forming ternary block copolymer-homopolymer blend thin films on chemical patterns

TitleShape control and density multiplication of cylinder-forming ternary block copolymer-homopolymer blend thin films on chemical patterns
Publication TypeJournal Article
Year of Publication2010
AuthorsKang, H, Detcheverry, F, Stuen, KO, Craig, GSW, De Pablo, JJ, Gopalan, P, Nealey, PF
JournalJournal of Vacuum Science & Technology B
Volume28
PaginationC6B24-C6B29
Date PublishedNov
Accession NumberISI:000285015200006