Planarization and Processing of Metamorphic Buffer Layers Grown by Hydride Vapor-Phase Epitaxy

TitlePlanarization and Processing of Metamorphic Buffer Layers Grown by Hydride Vapor-Phase Epitaxy
Publication TypeJournal Article
Year of Publication2014
AuthorsZutter, BT, Schulte, KL, Kim, TW, Mawst, LJ, Kuech, TF, Foran, B, Sin, YK
JournalJournal of Electronic Materials
Volume43
Pagination873-878
Date PublishedApr
DOI10.1007/s11664-013-2839-x