Optimizing AlF3 atomic layer deposition using trimethylaluminum and TaF5: Application to high voltage Li-ion battery cathodes

TitleOptimizing AlF3 atomic layer deposition using trimethylaluminum and TaF5: Application to high voltage Li-ion battery cathodes
Publication TypeJournal Article
Year of Publication2016
AuthorsJackson, DHK, Laskar, MR, Fang, SY, Xu, SZ, Ellis, RG, Li, XQ, Dreibelbis, M, Babcock, SE, Mahanthappa, MK, Morgan, D, Hamers, RJ, Kuech, TF
JournalJournal of Vacuum Science & Technology A
Volume34
Date PublishedMay
ISBN Number0734-2101
DOI10.1116/1.4943385