Nanofabrication of III-V semiconductors employing diblock copolymer lithography

TitleNanofabrication of III-V semiconductors employing diblock copolymer lithography
Publication TypeJournal Article
Year of Publication2010
AuthorsKuech, TF, Mawst, LJ
JournalJournal of Physics D-Applied Physics
Volume43
Date PublishedMay
DOI10.1088/0022-3727/43/18/183001