Kinetics of strain relaxation in semiconductor films grown on borosilicate glass-bonded substrates

TitleKinetics of strain relaxation in semiconductor films grown on borosilicate glass-bonded substrates
Publication TypeJournal Article
Year of Publication2001
AuthorsMoran, PD, Kuech, TF
JournalJournal of Electronic Materials
Volume30
Pagination802-806
Date PublishedJul
DOI10.1007/s11664-001-0060-9