InP Layer Transfer with Masked Implantation

TitleInP Layer Transfer with Masked Implantation
Publication TypeJournal Article
Year of Publication2009
AuthorsChen, WN, Bandaru, P, Tang, CW, Lau, KM, Kuech, TF, Lau, SS
JournalElectrochemical and Solid State Letters
Volume12
PaginationH149-H150
DOI10.1149/1.3078487