THE INFLUENCE OF HYDROCARBONS IN MOVPE GAAS GROWTH - IMPROVED DETECTION OF CARBON BY SECONDARY ION MASS-SPECTROSCOPY

TitleTHE INFLUENCE OF HYDROCARBONS IN MOVPE GAAS GROWTH - IMPROVED DETECTION OF CARBON BY SECONDARY ION MASS-SPECTROSCOPY
Publication TypeJournal Article
Year of Publication1988
AuthorsKuech, TF, Scilla, GJ, Cardone, F
JournalJournal of Crystal Growth
Volume93
Pagination550-556
Date PublishedNov-Dec
ISBN Number0022-0248
DOI10.1016/0022-0248(88)90582-9