Heteroepitaxy of GaAs on (001) double right arrow 6 degrees Ge substrates at high growth rates by hydride vapor phase epitaxy

TitleHeteroepitaxy of GaAs on (001) double right arrow 6 degrees Ge substrates at high growth rates by hydride vapor phase epitaxy
Publication TypeJournal Article
Year of Publication2013
AuthorsSchulte, KL, Wood, AW, Reedy, RC, Ptak, AJ, Meyer, NT, Babcock, SE, Kuech, TF
JournalJournal of Applied Physics
Volume113
Date PublishedMay
DOI10.1063/1.4803037