Fabrication of large-area, high-density Ni nanopillar arrays on GaAs substrates using diblock copolymer lithography and electrodeposition

TitleFabrication of large-area, high-density Ni nanopillar arrays on GaAs substrates using diblock copolymer lithography and electrodeposition
Publication TypeJournal Article
Year of Publication2013
AuthorsChang, CC, Botez, D, Wan, L, Nealey, PF, Ruder, S, Kuech, TF
JournalJournal of Vacuum Science & Technology B
Volume31
Date PublishedMay
DOI10.1116/1.4798464