Evolution of epilayer tilt in thick InxGa1-xAs metamorphic buffer layers grown by hydride vapor phase epitaxy

TitleEvolution of epilayer tilt in thick InxGa1-xAs metamorphic buffer layers grown by hydride vapor phase epitaxy
Publication TypeJournal Article
Year of Publication2015
AuthorsSchulte, KL, Strand, MT, Kuech, TF
JournalJournal of Crystal Growth
Volume426
Pagination283-286
Date PublishedSep
DOI10.1016/j.jcrysgro.2015.05.009