Effects of hydrogen implantation damage on the performance of InP/InGaAs/InP p-i-n photodiodes transferred on silicon

TitleEffects of hydrogen implantation damage on the performance of InP/InGaAs/InP p-i-n photodiodes transferred on silicon
Publication TypeJournal Article
Year of Publication2009
AuthorsChen, P, Chen, WV, Yu, PKL, Tang, CW, Lau, KM, Mawst, L, Paulson, C, Kuech, TF, Lau, SS
JournalApplied Physics Letters
Volume94
Date PublishedJan
DOI10.1063/1.3062848