The effect of helium ion implantation on the relaxation of strained InGaAs thin films

TitleThe effect of helium ion implantation on the relaxation of strained InGaAs thin films
Publication TypeJournal Article
Year of Publication2012
AuthorsPaulson, CA, Jha, S, Song, X, Rathi, M, Babcock, SE, Mawst, L, Kuech, TF
JournalThin Solid Films
Volume520
Pagination2147-2154
Date PublishedJan
DOI10.1016/j.tsf.2011.09.028