Design and characterization of thick InxGa1-xAs metamorphic buffer layers grown by hydride vapor phase epitaxy

TitleDesign and characterization of thick InxGa1-xAs metamorphic buffer layers grown by hydride vapor phase epitaxy
Publication TypeJournal Article
Year of Publication2014
AuthorsSchulte, KL, Zutter, BT, Wood, AW, Babcock, SE, Kuech, TF
JournalSemiconductor Science and Technology
Volume29
Date PublishedMar
DOI10.1088/0268-1242/29/3/035013