Defect reduction in epitaxial GaSb grown on nanopatterned GaAs substrates using full wafer block copolymer lithography

TitleDefect reduction in epitaxial GaSb grown on nanopatterned GaAs substrates using full wafer block copolymer lithography
Publication TypeJournal Article
Year of Publication2009
AuthorsJha, S, Liu, CC, Kuan, TS, Babcock, SE, Nealey, PF, Park, JH, Mawst, LJ, Kuech, TF
JournalApplied Physics Letters
Volume95
Date PublishedAug
DOI10.1063/1.3204013