Computational fluid dynamics-aided analysis of a hydride vapor phase epitaxy reactor

TitleComputational fluid dynamics-aided analysis of a hydride vapor phase epitaxy reactor
Publication TypeJournal Article
Year of Publication2016
AuthorsSchulte, KL, Simon, J, Roy, A, Reedy, RC, Young, DL, Kuech, TF, Ptak, AJ
JournalJournal of Crystal Growth
Volume434
Pagination138-147
Date PublishedJan
DOI10.1016/j.jcrysgro.2015.10.033