A comprehensive simulation model of the performance of photochromic films in absorbance-modulation-optical-lithography

TitleA comprehensive simulation model of the performance of photochromic films in absorbance-modulation-optical-lithography
Publication TypeJournal Article
Year of Publication2016
AuthorsMajumder, A, Helms, PL, Andrew, TL, Menon, R
JournalAip Advances
Volume6
Date PublishedMar
ISBN Number2158-3226
DOI10.1063/1.4944489