Chemical role of oxygen plasma in wafer bonding using borosilicate glasses

TitleChemical role of oxygen plasma in wafer bonding using borosilicate glasses
Publication TypeJournal Article
Year of Publication2001
AuthorsHansen, DM, Albaugh, CE, Moran, PD, Kuech, TF
JournalApplied Physics Letters
Volume79
Pagination3413-3415
Date PublishedNov
DOI10.1063/1.1418454