Chemical investigations of GaAs wafer bonded interfaces

TitleChemical investigations of GaAs wafer bonded interfaces
Publication TypeJournal Article
Year of Publication2001
AuthorsHansen, DM, Albaugh, CE, Moran, PD, Kuech, TF
JournalJournal of Applied Physics
Volume90
Pagination5991-5999
Date PublishedDec
DOI10.1063/1.1416139