Boron-Induced Morphology Changes in Silicon Chemical-Vapor-Deposition - a Scanning-Tunneling-Microscopy Study

TitleBoron-Induced Morphology Changes in Silicon Chemical-Vapor-Deposition - a Scanning-Tunneling-Microscopy Study
Publication TypeJournal Article
Year of Publication1995
AuthorsWang, YJ, Hamers, RJ
JournalApplied Physics Letters
Volume66
Pagination2057-2059
Date PublishedApr
ISBN Number0003-6951
Accession NumberWOS:A1995QT72800016