Barrier-free absorbance modulation for super-resolution optical lithography

TitleBarrier-free absorbance modulation for super-resolution optical lithography
Publication TypeJournal Article
Year of Publication2015
AuthorsMajumder, A, Masid, F, Pollock, B, Andrew, TL, Menon, R
JournalOptics Express
Volume23
Pagination12244-12250
Date PublishedMay
ISBN Number1094-4087
DOI10.1364/oe.23.012244