Atomic layer deposition of titanium phosphate on silica nanoparticles

TitleAtomic layer deposition of titanium phosphate on silica nanoparticles
Publication TypeJournal Article
Year of Publication2012
AuthorsWiedmann, MK, Jackson, DHK, Pagan-Torres, YJ, Cho, E, Dumesic, JA, Kuech, TF
JournalJournal of Vacuum Science & Technology A
Volume30
Date PublishedJan
DOI10.1116/1.3664097