Atomic absorption spectroscopic measurements of silicon atom concentrations in electron cyclotron resonance silicon oxide deposition plasmas

TitleAtomic absorption spectroscopic measurements of silicon atom concentrations in electron cyclotron resonance silicon oxide deposition plasmas
Publication TypeJournal Article
Year of Publication1999
AuthorsAugustyniak, E, Chew, KH, Shohet, JL, Woods, RC
JournalJournal of Applied Physics
Volume85
Pagination87-93
Date PublishedJan
ISBN Number0021-8979
Accession NumberWOS:000077489200012